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Definition of coat
1 : to cover a
substrate
surface
with a
layer
of a
material
by the spinning of a
resist
. [SEMATECH] n 2 : the cover applied by the spinning of a
resist
. [SEMATECH] 3 : a
step
in the resist-apply
operation
in which a uniform
film
is applied to the entire face of a
wafer
. [SEMATECH]
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