Definition of dichlorosilane (H2SiCl2)

1. a flammable, corrosive, colorless liquid that hydrolyzes (reacts) in the presence of moisture. It oxidizes readily and rapidly to release hydrogen chloride, and is easily ignited in the presence of air. Dichlorosilane is used in the growth of epitaxial silicon and polycrystalline silicon and in the chemical vapor deposition of silicon dioxide and silicon nitride. [SEMI C3.18-89]