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Definition of indirect alignment
in the
surface roughness
measurement of
flat
panel
display
glass
substrates, the mechanical positioning of (a)
alignment
marks on the
FPD
substrate
to one set of reference points in the stepper, and (b)
alignment
marks on the reticle(s) to a second set of reference points in the
stepper
. [SEMI D8-94] Contrast with direct
alignment
.
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