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Definition of isolated high-pressure purge system
a high-pressure purge
system
that isolates the
pressure
regulator
from the purged
volume
by means of a
shutoff valve
. Three valves are required: a purge
gas
inlet valve, a high-pressure vent valve, and a high-pressure
isolation
valve
. [SEMI International
Standards
1990, Vol. 1, Glossary]
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