Definition of point of use (POU)

1. in gas source control equipment (GSCE), the manufacturing tool that uses the product. POU is distinguished from the GSCE by having its own design criteria, a separate function, and a physical separation from the GSCE. [SEMI F13-93] 2 adj : refers to tool-specific air emissions abatement equipment; for example, thermal oxidizers are used in some facilities to control volatile organic carbon emissions from lithography track equipment. Can also refer to a gas supply mechanism located at the tool that avoids the risk associated with transporting and piping hazardous gases such as silane. [SEMATECH]