1 : a nonporous form of silicon made up of randomly oriented crystallites or domains, including glassy or amorphous silicon layers. [ASTM F399-88] 2 : silicon formed by chemical vapor deposition from a silicon source gas or other methods and having a structure that contains large-angle grain boundaries, twin boundaries, or both. [SEMI M16-89] Also called poly and polysilicon. Contrast amorphous silicon and single crystal .
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