1 : on a substrate, local damage caused by mechanical probing or measurement. Probe damage consists of pitted areas that have spacing equal to that of the probe array. [SEMI Materials, Vol. 3, Definitions for Semiconductor Materials and SEMI M10-89] 2 : in gallium arsenide technology, any damage to the wafer surface caused by mechanical probing or measurement. [SEMI M10-89] Also see probe and crack.
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