Definition of slot

1. 1 : the area in which a wafer is situated within a wafer carrier. [SEMATECH] 2 : a two-sided support for a standard wafer carrier when the carrier is oriented with its axis in a vertical attitude. [SEMI E22-91] 3 : in cluster tools, a wafer location within a cassette module associated with the function of wafer I/O. Wafers enter or leave the intratool environment through slots. Generally, a slot, through its slot group, corresponds to a carrier location within a wafer carrier. [SEMATECH]