Definition of solvent residue

1. 1 : a type of dirt found on wafer surfaces after solvent evaporation from the surface. The residue either is left by the solvent itself or is material that the solvent has removed from the surface and redeposited. [ASTM F1241] 2 : type of film found on wafer surfaces after solvent evaporation from the surface. [SEMI M10-89]