Definition of standard volumetric flow

1. in mass flow controllers, the calculated volumetric flow, at standard temperature and pressure, of gas in a closed fluid channel. Volume at standard temperature and pressure follows the ideal gas law, PV=nRT. Units of standard volumetric flow are commonly used to express mass flow in mass flow controllers and meters. Also see mass flow of gas, standard temperature, standard pressure, mass flow controller, and mass flow meter. [SEMI E29-93]