Definition of surface defects

1. 1 : in the manufacture of silicon on sapphire (SOS) epitaxial silicon wafers, mechanical imperfections, SiO2 residual dust, and other imperfections visible on the wafer surface. Some examples of surface defects are: dimples, pits, particulates, spots, scratches, smears, hillocks, and polycrystalline regions. [SEMI M4-88] 2 : in flat panel display substrates, a marking, tearing or single line abrasion on the glass surface. [SEMI D9-94]