a flow device for generating a vacuum by means of air flow or purge-gas flow through a restricted orifice. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]
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a flow device for generating a vacuum by means of air flow or purge-gas flow through a restricted orifice. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]