Definition of wafer, test

1. 1 : a wafer that is exposed to all of the conditions of process characterization, including, but not limited to, actual etch conditions or actual film deposition conditions. [SEMATECH] Also called monitor wafer. 2 : a silicon wafer suitable for process monitoring during semiconductor manufacturing. The two types are the reclaim test wafer and the virgin test wafer . [SEMI M8-84]