1 : the property of atoms to absorb X rays and emit light of characteristic wavelengths. [SEMATECH] 2 : a material diagnostic technique that determines the surface concentration of contaminants. [SEMATECH]
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1 : the property of atoms to absorb X rays and emit light of characteristic wavelengths. [SEMATECH] 2 : a material diagnostic technique that determines the surface concentration of contaminants. [SEMATECH]