1 : in lithography, an arrangement of repetitive patterns on a die, such as an array of memory cells. [SEMATECH]
2 : in lithography, all of a class of functional patterns taken as a group that appears on a wafer or that is produced by stepping (as on a photographic material). [ASTM F127-84]
3 : in packaging, a group of pads, pins, or circuits arranged in rows and columns on one substrate. [SEMATECH]
