a highly toxic, flammable, and colorless gas with the odor of decaying fish. In high concentrations, it is pyrophoric (capable of igniting spontaneously when exposed to air). Phosphine is used for the n-type doping of epitaxial and silicon dioxide films and for ion implantation. It also is used in the production of gallium arsenide phosphide films used to fabricate light-emitting diodes and as a phosphorus source for applications of both chemical deposition and ion implantation. [SEMI C3.6-88]
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